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Keyword
keyword
Back end of line
RIS
0.000
(Research Intensity Score)
Papers
61
Top papers
Low-thermal-budget synthesis of monolayer molybdenum disulfide for silicon back-end-of-line integration on a 200 mm platform
2023 · 259 citations
Monolithic back-end-of-line integration of phase change materials into foundry-manufactured silicon photonics
2024 · 76 citations
CMOS backend-of-line compatible memory array and logic circuitries enabled by high performance atomic layer deposited ZnO thin-film transistor
2023 · 73 citations
An Epitaxial Ferroelectric ScAlN/GaN Heterostructure Memory
2022 · 137 citations
A ferroelectric–memristor memory for both training and inference
2025 · 12 citations
A 64-kilobit spin–orbit torque magnetic random-access memory based on back-end-of-line-compatible β-tungsten
2025 · 10 citations
Graphene-All-Around Cobalt Interconnect with a Back-End-of-Line Compatible Process
2024 · 21 citations
Defect Dynamics in Silicon-Doped HfO 2 -Based Front-End-of-Line FeFETs: Insights From Low-Frequency Noise on Doping Concentration, Interfaces, and Write Cycling
2025 · 5 citations
Back-End, CMOS-Compatible Ferroelectric Field-Effect Transistor for Synaptic Weights
2020 · 109 citations
Newest papers
Best Practices for First-Principles Modeling of Amorphous Oxide Semiconductors: A Statistical Framework and Application to Zn-Sn-O
2026
A ferroelectric–memristor memory for both training and inference
2025 · 12 citations
A 64-kilobit spin–orbit torque magnetic random-access memory based on back-end-of-line-compatible β-tungsten
2025 · 10 citations
Defect Dynamics in Silicon-Doped HfO 2 -Based Front-End-of-Line FeFETs: Insights From Low-Frequency Noise on Doping Concentration, Interfaces, and Write Cycling
2025 · 5 citations
Amorphous Silicon Avalanche Photodiode for Back-End-of-Line CMOS Integration
2025 · 3 citations
High- κ HfO2/ZrO2 superlattice for BEOL-compatible GAAFET memory device
2025 · 3 citations
Electrical Instability in Flexible Polysilicon Thin-Film Transistors Under Random Mechanical Stress
2025 · 1 citations
Multistate resistance in TaN/(Hf,Zr)O2/Ta ferroelectric tunnel junctions
2025 · 3 citations
High yield, low disorder Si/SiGe heterostructures for spin qubit devices manufactured in a BiCMOS pilot line
2025 · 1 citations
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