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Chemical-mechanical planarization
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keyword
Chemical-mechanical planarization
RIS
0.003
(Research Intensity Score)
Papers
358
Top papers
De‐Passivation and Surface Crystal Plane Reconstruction via Chemical Polishing for Highly Reversible Zinc Anodes
2024 · 134 citations
Towards practical quantum computers: transmon qubit with a lifetime approaching 0.5 milliseconds
2022 · 369 citations
Chemical–Mechanical Polishing of 4H Silicon Carbide Wafers
2023 · 121 citations
Chemical Polishing of Perovskite Surface Enhances Photovoltaic Performances
2022 · 202 citations
Grinding and lapping induced surface integrity of silicon wafers and its effect on chemical mechanical polishing
2022 · 157 citations
Multi-physical field coupling polishing of diamond for atomic-scale damage-free surface
2026 · 23 citations
Enhanced chemical mechanical polishing (CMP) performance of porous self-assembled spherical cerium oxide via RE(La/Pr/Nd) doping
2025 · 33 citations
Photocatalytic assisted chemical mechanical polishing for silicon carbide using developed ceria coated diamond core-shell abrasives
2024 · 44 citations
Preparation of CeO 2 Polishing Powder and Its Performance and Mechanism for Chemical Mechanical Polishing of Optical Glass
2025 · 28 citations
Newest papers
Multi-physical field coupling polishing of diamond for atomic-scale damage-free surface
2026 · 23 citations
A novel approach of micro-nano bubbles enhanced immersed chemical mechanical polishing on orthopedic implants with curved surface using a developed polisher
2026 · 7 citations
Machine Learning-Driven Optimization of Silicon Carbide Chemical Mechanical Polishing with Surface Roughness Constraints
2026 · 8 citations
Atomic level surface on aluminum alloy produced by novel environmentally-friendly photocatalytic chemical mechanical polishing with high material removal rate using hybrid ceria nanoabrasives
2026 · 6 citations
Novel multiphasic jet chemical mechanical polishing on interior surface of fine thin-walled components produced by additive manufacturing performed by two kinds of developed setups
2026 · 4 citations
Three-step electrochemical shear thickening polishing for damage-free processing of 4H-SiC wafers
2026 · 4 citations
Synthesis of CeO 2 Composite Particles for Chemical Mechanical Polishing of Single-Crystal SiC Substrates and Their Polishing Applications: A Review
2026 · 4 citations
Classification, performance and recycling of ceria-based materials used for chemical mechanical polishing
2026 · 4 citations
Optimization of polishing parameters for surface roughness and material removal in chemical mechanical polishing of hard optical materials
2026 · 3 citations
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