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Keyword keyword

Chemical-mechanical planarization

RIS 0.004
Papers 356
Top papers
2024 · 149 citations
2022 · 383 citations
2023 · 127 citations
2022 · 202 citations
2022 · 157 citations
Newest papers
2026 · 23 citations
2026 · 8 citations
2026 · 7 citations
2026 · 6 citations
2025 · 34 citations

A sample from the 100 top papers behind Chemical-mechanical planarization.

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Chemical-mechanical planarization's history

Research intensity over time

Chemical-mechanical planarization research intensity over time Explore Chemical-mechanical planarization's full history Hover any year for its value and switch resolutions with a free account. Personal adds monthly detail and the historical-intensity (HRI) line. Create a free account