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copper interconnect
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Current data, viewed at
Yearly
resolution.
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Application
keyword
copper interconnect
RIS
0.002
(Research Intensity Score)
Papers
291
Top papers
Electroplated Copper Additives for Advanced Packaging: A Review
2024 · 90 citations
CMOS backend-of-line compatible memory array and logic circuitries enabled by high performance atomic layer deposited ZnO thin-film transistor
2023 · 79 citations
Stress-induced warpage estimation of advanced semiconductor copper interconnect processes
2024 · 22 citations
Ultra-smooth silicon nitride waveguides based on the Damascene reflow process: fabrication and loss origins
2018 · 246 citations
Effects of pyrazine and its derivatives as inhibitors on copper film chemical-mechanical polishing properties for ruthenium-based copper interconnect
2024 · 16 citations
Newest papers
Copper damascene process-based high-performance thin-film lithium tantalate modulators
2026 · 2 citations
Research progress on galvanic corrosion mechanisms and suppression strategies in Cu interconnect CMP processes for IC
2026 · 2 citations
Impact of DC current density on filling mechanism and microstructural evolution of metallization in TGV
2026 · 1 citations
Tantalum Damascene Coplanar Waveguide Resonators Fabricated Using 300 mm Scale Processes
2026
Tantalum Damascene Coplanar Waveguide Resonators Fabricated Using 300 mm Scale Processes
2026
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