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copper interconnect
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Current data, viewed at
Yearly
resolution.
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Application
keyword
copper interconnect
RIS
0.001
(Research Intensity Score)
Papers
153
Top papers
Electroplated Copper Additives for Advanced Packaging: A Review
2024 · 90 citations
CMOS backend-of-line compatible memory array and logic circuitries enabled by high performance atomic layer deposited ZnO thin-film transistor
2023 · 73 citations
Stress-induced warpage estimation of advanced semiconductor copper interconnect processes
2024 · 22 citations
Influence of trace tungsten contents on thin-film properties and electromigration behaviors of electroless-deposited cobalt interconnect lines
2025 · 8 citations
Copper damascene process-based high-performance thin-film lithium tantalate modulators
2026 · 2 citations
Impact of DC current density on filling mechanism and microstructural evolution of metallization in TGV
2026 · 1 citations
Research progress on galvanic corrosion mechanisms and suppression strategies in Cu interconnect CMP processes for IC
2026 · 2 citations
Effects of pyrazine and its derivatives as inhibitors on copper film chemical-mechanical polishing properties for ruthenium-based copper interconnect
2024 · 13 citations
Effect of novel non-inhibitor slurry on chemical mechanical polishing properties of copper interconnect copper film based on experiments and theoretical calculations
2024 · 9 citations
Newest papers
Copper damascene process-based high-performance thin-film lithium tantalate modulators
2026 · 2 citations
Impact of DC current density on filling mechanism and microstructural evolution of metallization in TGV
2026 · 1 citations
Research progress on galvanic corrosion mechanisms and suppression strategies in Cu interconnect CMP processes for IC
2026 · 2 citations
Tantalum Damascene Coplanar Waveguide Resonators Fabricated Using 300 mm Scale Processes
2026
Tantalum Damascene Coplanar Waveguide Resonators Fabricated Using 300 mm Scale Processes
2026
Influence of trace tungsten contents on thin-film properties and electromigration behaviors of electroless-deposited cobalt interconnect lines
2025 · 8 citations
Future interconnect materials for highly integrated semiconductor devices
2025
Enhanced copper interconnect module based on flake graphene copper femtosecond laser processing
2025
Copper Damascene Process-Based High-Performance Thin Film Lithium Tantalate Modulators
2025 · 1 citations
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