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Electron-beam lithography
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Electron-beam lithography
RIS
0.001
(Research Intensity Score)
Papers
164
Top papers
Review of: "Amplification of Nano Wires Nano Wire by Electron Nano Lithography"
2023 · 513 citations
Liquid Hydrogen Temperature Cryostage for Ice-Assisted Electron-Beam Lithography
2024 · 55 citations
Direct X-ray and electron-beam lithography of halogenated zeolitic imidazolate frameworks
2020 · 199 citations
Zinc‐Imidazolate Films as an All‐Dry Resist Technology
2023 · 34 citations
Wafer-Scale All-Dielectric Quasi-BIC Metasurfaces: Bridging High-Throughput Deep-UV Lithography with Nanophotonic Applications
2026 · 7 citations
A review of 2D and 3D plasmonic nanostructure array patterns: fabrication, light management and sensing applications
2018 · 460 citations
Inverse-designed broadband low-loss grating coupler on thick lithium-niobate-on-insulator platform
2024 · 23 citations
Enhanced absorption in thin-film silicon solar cells using a broadband plasmonic nanostructure
2025 · 8 citations
Single-pulse lithography of amorphous photonic architectures inside all-inorganic dielectric crystals
2026 · 3 citations
Newest papers
Wafer-Scale All-Dielectric Quasi-BIC Metasurfaces: Bridging High-Throughput Deep-UV Lithography with Nanophotonic Applications
2026 · 7 citations
Single-pulse lithography of amorphous photonic architectures inside all-inorganic dielectric crystals
2026 · 3 citations
Aromatic organic-tin hybrid films as electron beam resists
2026 · 2 citations
Enhancing Photothermal Responses in Ultra-high-Q Silica WGM Microcavities via Au NR@Bi₂Se₃ Core-shell Nanostructures
2026
Enhanced Second Harmonic Generation in a strain-plasmonic coupled Au@WS₂ Core-shell nanoparticle on a gold film
2026
Ultrabroadband Polarization Beam Splitter by Harnessing the Dispersion of Subwavelength Metamaterials
2026
Hybrid metal-organic clusters resist for next-generation high-NA EUV lithography
2026 · 1 citations
Low-Threshold 571 nm Plasmonic Nanolaser from InGaN/GaN Nanopillars
2026
All-optical router through dynamically controlling the distribution of electron concentration in indium tin oxide
2026
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