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Keyword keyword

Electron-beam lithography

RIS 0.002
Papers 237
Top papers
2023 · 513 citations
2025 · 36 citations
2023 · 57 citations
2024 · 55 citations
2020 · 202 citations
Newest papers
2026 · 7 citations
2026 · 3 citations
2026 · 2 citations
2026 · 2 citations
2026 · 1 citations

A sample from the 100 top papers behind Electron-beam lithography.

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Electron-beam lithography's history

Research intensity over time

Electron-beam lithography research intensity over time Explore Electron-beam lithography's full history Hover any year for its value and switch resolutions with a free account. Personal adds monthly detail and the historical-intensity (HRI) line. Create a free account