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Equivalent oxide thickness
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Keyword
keyword
Equivalent oxide thickness
RIS
0.003
(Research Intensity Score)
Papers
429
Top papers
High-performance p-type bilayer WSe2 field effect transistors by nitric oxide doping
2025 · 57 citations
A single-crystalline native dielectric for two-dimensional semiconductors with an equivalent oxide thickness below 0.5 nm
2022 · 184 citations
Sub-Nanometer Equivalent Oxide Thickness and Threshold Voltage Control Enabled by Silicon Seed Layer on Monolayer MoS 2 Transistors
2025 · 38 citations
A native oxide high-κ gate dielectric for two-dimensional electronics
2020 · 306 citations
Controllable synthesis of nonlayered high-κ Mn3O4 single-crystal thin films for 2D electronics
2025 · 31 citations
Newest papers
Wafer-scale high-κ HfO2 dielectric films with sub-5-Å equivalent oxide thickness for 2D MoS2 transistors
2026 · 5 citations
Beyond ZrO 2 : Rutile TiO 2 as the Dielectric Platform for Next-Generation DRAM Capacitors
2026 · 4 citations
Gate dielectric stack design for 2D materials-based electronics
2026 · 1 citations
Al-Doped Rutile TiO 2 with Y 2 O 3 –ZrO 2 Stacks Achieving Thin Thickness and Low Leakage for Dynamic Random-Access Memory Capacitors
2026 · 1 citations
A sacrificial HfN interlayer enables oxygen-buffered Mo electrodes for sub‑0.4nm equivalent oxide thickness of HfO2/ZrO2 nanolaminates for DRAM capacitors
2026
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