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Extreme ultraviolet
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Keyword
keyword
Extreme ultraviolet
RIS
0.002
(Research Intensity Score)
Papers
360
Top papers
Extreme ultraviolet lithography
2024 · 121 citations
Single Rare-Earth Ion Doped Tin-Oxo Nanocluster Photoresists for High-Resolution Extreme Ultraviolet Lithography
2025 · 36 citations
Observation of Rabi dynamics with a short-wavelength free-electron laser
2022 · 100 citations
Compact realization of all-attosecond pump-probe spectroscopy
2024 · 45 citations
Polytelluoxane as the ideal formulation for EUV photoresist
2025 · 16 citations
Simulation of flow and debris migration in extreme ultraviolet source vessel
2024 · 38 citations
Attosecond metrology of vacuum-ultraviolet high-order harmonics generated in semiconductors via laser-dressed photoionization of alkali metals
2025 · 16 citations
Ultra-short-pulse high-average-power megahertz-repetition-rate coherent extreme-ultraviolet light source
2021 · 116 citations
Efficient generation of Bessel-Gauss attosecond pulse trains via nonadiabatic phase-matched high-order harmonics
2025 · 12 citations
Newest papers
Aromatic organic-tin hybrid films as electron beam resists
2026 · 2 citations
Depth profiling chemical changes in chemically amplified resists for EUV lithography
2026
A Point-spread Function for the Extreme Ultraviolet High-resolution Imager on Board Solar Orbiter
2026
Active Control of Extreme Ultraviolet Photon Flux and Resolution with a Plane Ruled Reflection Grating Spectrometer that Measures Diverging High-Harmonics
2026
High Contrast EUV Imaging Enabled by Topological Quasi Phase-Only Masks
2026
High Contrast EUV Imaging Enabled by Topological Quasi Phase-Only Masks
2026
Femtosecond Dispersion Control in the Extreme Ultraviolet Spectrum of Atoms and Small Molecules
2026
The High-NA EUV Lithography: Architecture and Operation in ASML TwinScan EXE:5000 Systems
2026
The High-NA EUV Lithography: Architecture and Operation in ASML TwinScan EXE:5000 Systems
2026
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