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Keyword keyword

Extreme ultraviolet lithography

RIS 0.002
Papers 234
Top papers
2024 · 134 citations
2024 · 46 citations
2025 · 36 citations
2022 · 88 citations
2025 · 25 citations
Newest papers
2026 · 6 citations
2026 · 2 citations
2026 · 2 citations
2026 · 2 citations
2026 · 2 citations

A sample from the 100 top papers behind Extreme ultraviolet lithography.

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Extreme ultraviolet lithography's history

Research intensity over time

Extreme ultraviolet lithography research intensity over time Explore Extreme ultraviolet lithography's full history Hover any year for its value and switch resolutions with a free account. Personal adds monthly detail and the historical-intensity (HRI) line. Create a free account