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Microelectromechanical systems
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Microelectromechanical systems
RIS
0.004
(Research Intensity Score)
Papers
683
Top papers
A large-scale microelectromechanical-systems-based silicon photonics LiDAR
2022 · 423 citations
Piezoelectric Biosensor based on ultrasensitive MEMS system
2024 · 92 citations
Grayscale Lithography and a Brief Introduction to Other Widely Used Lithographic Methods: A State-of-the-Art Review
2024 · 73 citations
Integrated silicon photonic MEMS
2023 · 142 citations
Pulse-driven MEMS gas sensor combined with machine learning for selective gas identification
2025 · 45 citations
An overview on room-temperature chemiresistor gas sensors based on 2D materials: Research status and challenge
2022 · 155 citations
Rational Design and Fabrication of MEMS Gas Sensors With Long‐Term Stability: A Comprehensive Review
2025 · 31 citations
Ultrahigh-quality-factor micro- and nanomechanical resonators using dissipation dilution
2024 · 69 citations
CMOS-Integrated Aluminum Nitride MEMS: A Review
2022 · 145 citations
Newest papers
Pullulan-based semi-interpenetrating network hydrogel sensor for artificial intelligence-driven pressure recognition
2026 · 3 citations
All-silica optical fiber Fabry-Perot vibration sensor based on MEMS and laser welding for high temperature up to 800 ℃
2026 · 3 citations
Material-process controlled DLP printing of BaTiO3 with synchronized precision and piezoelectricity for micro-transducers
2026 · 3 citations
Enhanced electromechanical coupling in piezoelectric MEMS vibration energy harvesters via strain-induced phase transition in Mn-doped bismuth ferrite epitaxial films
2026 · 2 citations
Silicon photonic MEMS multi-beam laser scanner with integrated angle sensors
2026
Theoretical and Numerical Investigation of Normalized Sensitivity in MEMS Capacitive Pressure Sensors Based on Dimensionless Large-Deflection Governing Equations
2026
FEM Modeling of Coupled Modes Vibrations and Rock-Cutting Elements Wear in Percussive–Rotary Drilling of Geological Materials
2026
A novel low-pressure MEMS device design with nested circular meanders connected to circular membrane structure
2026
Microstructure influence on getter properties of Zr-V thin films for vacuum microelectromechanical system packaging
2026
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