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Microfabrication
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Keyword
keyword
Microfabrication
RIS
0.001
(Research Intensity Score)
Papers
163
Top papers
Grayscale Lithography and a Brief Introduction to Other Widely Used Lithographic Methods: A State-of-the-Art Review
2024 · 73 citations
Wafer-scale monolithic integration of full-colour micro-LED display using MoS2 transistor
2022 · 244 citations
Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication
2021 · 277 citations
Silicon-Based Biosensors: A Critical Review of Silicon’s Role in Enhancing Biosensing Performance
2025 · 37 citations
Patchy nanoparticles by atomic stencilling
2025 · 24 citations
Deep-Ultraviolet AlN Metalens with Imaging and Ultrafast Laser Microfabrication Applications
2025 · 32 citations
Recent Design and Application Advances in Micro-Electro-Mechanical System (MEMS) Electromagnetic Actuators
2025 · 23 citations
Methods to achieve ultra-high quality factor silicon nitride resonators
2021 · 174 citations
Fabrication of microchannel heat sinks using additive manufacturing: A review
2026 · 8 citations
Newest papers
Fabrication of microchannel heat sinks using additive manufacturing: A review
2026 · 8 citations
Low-power biomimetic ionic thermoelectric device for multi-gas olfaction
2026 · 1 citations
Three-dimensional microelectrode arrays for in vitro neuronal network models: structural designs, manufacturing approaches, and future perspectives
2026
Intensity-StableWavelength Tuning in InGaN/GaN MultipleQuantum Wells
2026
Developing the NewAthena X-IFU Cryogenic AntiCoincidence Detector (CryoAC): From Microfabrication Process Standardization to Cryogenic Functional Verification Toward TRL5
2026
Patterning of Multilayer Biointerfaces Driven by Microbubble Lithography Toward Optical Biochips
2026
Real-time electrochemical protein monitoring using molecular pendulum sensors
2026
Modeling and validation of anisotropic thin-film deposition on cylindrical substrates for predictable resistance control in MEMS fabrication
2026 · 1 citations
Simulation-based comparative study of displacement characteristics of flexible microcantilevers with diverse cross-sectional geometries in fluid flow
2026
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