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Photolithography
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Keyword
keyword
Photolithography
RIS
0.002
(Research Intensity Score)
Papers
361
Top papers
Scalable manufacturing of high-index atomic layer–polymer hybrid metasurfaces for metaphotonics in the visible
2023 · 271 citations
High-power AlGaN deep-ultraviolet micro-light-emitting diode displays for maskless photolithography
2024 · 80 citations
25 nm-Feature, 104-aspect-ratio, 10 mm2-area single-pulsed laser nanolithography
2025 · 48 citations
Highly reproducible van der Waals integration of two-dimensional electronics on the wafer scale
2023 · 162 citations
Direct in situ photolithography of perovskite quantum dots based on photocatalysis of lead bromide complexes
2022 · 162 citations
Full integration of highly stretchable inorganic transistors and circuits within molecular-tailored elastic substrates on a large scale
2024 · 58 citations
Cation-π interactions enabled water-stable perovskite X-ray flat mini-panel imager
2024 · 63 citations
Near-infrared organic photoelectrochemical synaptic transistors by wafer-scale photolithography for neuromorphic visual system
2025 · 21 citations
Wafer‐Scale Manufacturing of Near‐Infrared Metalenses
2024 · 55 citations
Newest papers
Fabrication of NbC/GaN Nanofilm Sensor via Photolithography and its Investigation as a Sensor for Trimethylamine Mixed Gas Detection Using Dual-Feature Extraction and Deep Learning
2026 · 7 citations
A review of nanoimprint lithography for improving the optical performance of solar cells
2026 · 2 citations
Fabrication and characterization of three-dimensional molybdenum disulfide structures by stress-driven self-assembly
2026
Depth profiling chemical changes in chemically amplified resists for EUV lithography
2026
Direct printing of metasurfaces using formulated optical materials
2026
High Contrast EUV Imaging Enabled by Topological Quasi Phase-Only Masks
2026
High Contrast EUV Imaging Enabled by Topological Quasi Phase-Only Masks
2026
Positive and Negative Dual-Type Hafnium-Based Hybrid Dry Photoresist for Nanolithography
2026 · 2 citations
Ultralow-loss and ultrahigh-efficiency O-band LNOI electro-optic modulator enabled by cost-effective PLACE technology
2026
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