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Photoresist
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Keyword
keyword
Photoresist
RIS
0.001
(Research Intensity Score)
Papers
192
Top papers
Soft and elastic hydrogel-based microelectronics for localized low-voltage neuromodulation
2019 · 810 citations
Development of p-type zinc oxide nanorods on zirconium-based metallic glass nanotube arrays by facile hydrothermal method for gas sensing applications
2023 · 63 citations
Polytelluoxane as the ideal formulation for EUV photoresist
2025 · 16 citations
Tin‐Oxo Nanocluster Composite Films as Positive‐Tone Photoresist for Extreme UV Lithography
2025 · 13 citations
Atomically Precise Interfacial Engineering on Tin‐Silicon Oxo Clusters for Sub‐8 nm Lithography
2026 · 5 citations
Tin‐Oxo Nanocluster Extreme UV Photoresists Equipped with Chemical Features for Atmospheric Stability and High EUV Sensitivity
2025 · 6 citations
A highly hydroxylated 6-tin oxide cluster serves as an efficient e-beam and EUV-photoresist to achieve high-resolution patterns
2025 · 8 citations
Study of molecular layer deposition of zinc-based hybrid film as photoresist
2024 · 12 citations
Roll-to-Roll AgNWs Networks/Ag Finger by Self-Masking Protection for Large-Area Monolithic Flexible Organic Solar Cells
2026 · 3 citations
Newest papers
Atomically Precise Interfacial Engineering on Tin‐Silicon Oxo Clusters for Sub‐8 nm Lithography
2026 · 5 citations
Roll-to-Roll AgNWs Networks/Ag Finger by Self-Masking Protection for Large-Area Monolithic Flexible Organic Solar Cells
2026 · 3 citations
Aromatic organic-tin hybrid films as electron beam resists
2026 · 2 citations
Depth profiling chemical changes in chemically amplified resists for EUV lithography
2026
Understanding plasma etching processes through surface reaction models
2026
Tert‐Butyl–Engineered Trinuclear Tin Complexes for High‐Sensitivity Sub‐10 Nm Patterning
2026 · 2 citations
Positive and Negative Dual-Type Hafnium-Based Hybrid Dry Photoresist for Nanolithography
2026 · 2 citations
Improvements of Applying RAFT Polymerization in High-performance Photoresist Manufacture
2026
Mechanism of Vapor-Phase Infiltration of Organometallic Hf in Poly(Methyl Methacrylate) for Hybrid Resist Applications
2026 · 2 citations
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