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Semiconductor device fabrication
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Semiconductor device fabrication
RIS
0.001
(Research Intensity Score)
Papers
61
Top papers
12-inch growth of uniform MoS2 monolayer for integrated circuit manufacture
2023 · 229 citations
A RISC-V 32-bit microprocessor based on two-dimensional semiconductors
2025 · 91 citations
Human–machine collaboration for improving semiconductor process development
2023 · 134 citations
Fabrication of carbon nanotube field-effect transistors in commercial silicon manufacturing facilities
2020 · 277 citations
Practical Guidance on Selecting Analytical Methods for PFAS in Semiconductor Manufacturing Wastewater
2025 · 14 citations
Improving Semiconductor Device Modeling for Electronic Design Automation by Machine Learning Techniques
2023 · 41 citations
Enhancing HVAC energy efficiency modeling in semiconductor manufacturing facilities using tree-structured parzen estimator-optimized deep learning
2025 · 18 citations
Review of Applications of Regression and Predictive Modeling in Wafer Manufacturing
2025 · 10 citations
Scanning electron microscopy-based automatic defect inspection for semiconductor manufacturing: a systematic review
2025 · 12 citations
Newest papers
Challenges and Opportunities in PFAS Waste Management for Semiconductor Manufacturing
2026 · 5 citations
Nanoscale Characterizationof Cobalt Exposure in Nano-through-SiliconVias via Photoinduced Force Microscopy: Implications for 3D InterconnectArchitectures
2026
Virtual Metrology for Plasma Etching: A Two-Stage Framework for Sensor Data Compression and Prediction
2026
Implementation of agile die-level TSV formation and heterogeneous integration with standard multi-project wafer shuttle dies
2026
Wafer Support Systems (WSSs) as Beam–Matter Interaction Platforms: Electrostatic Chucking, Thermal Transport, Metrology Coupling, Industrial Architectures, and Emerging Semiconductor Platforms
2026
Primary Humidity Standards for Trace Water Measurements in Ultra-High-Purity Process Gases
2026
Advances in Machine Learning-based Compact Modeling of Semiconductor Devices
2026
A crossbar chip for benchmarking semiconductor spin qubits
2026 · 1 citations
COFFEE: A Carbon-Modeling and Optimization Framework for HZO-based FeFET eNVMs
2026 · 1 citations
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