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Keyword keyword

Shallow trench isolation

RIS 0.000
Papers 46
Top papers
2023 · 51 citations
2023 · 49 citations
2025 · 15 citations
2025 · 12 citations
2023 · 19 citations
Newest papers
2026 · 1 citations
2025 · 15 citations
2025 · 12 citations
2025 · 7 citations
2025 · 7 citations

A sample from the 46 top papers behind Shallow trench isolation.

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Shallow trench isolation's history

Research intensity over time

Shallow trench isolation research intensity over time Explore Shallow trench isolation's full history Hover any year for its value and switch resolutions with a free account. Personal adds monthly detail and the historical-intensity (HRI) line. Create a free account