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Atomic layer epitaxy
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Keyword
keyword
Atomic layer epitaxy
RIS
0.001
(Research Intensity Score)
Papers
125
Top papers
Zinc oxide light-emitting diodes: a review
2019 · 232 citations
Atomic layer deposition of SnO2 and TiO2 on electrodeposited BiOI thin films for efficient light-driven peroxymonosulfate activation
2025 · 13 citations
Handbook of Thin Film Process Technology: 98/1 Reactive Sputtering
2017 · 323 citations
Wide-Bandgap Semiconductors: A Critical Analysis of GaN, SiC, AlGaN, Diamond, and Ga2O3 Synthesis Methods, Challenges, and Prospective Technological Innovations
2025 · 13 citations
Defect-Free, Few-Atomic-Layer Thin ZnO Nanosheets with Superior Excitonic Properties for Optoelectronic Devices
2024 · 16 citations
Newest papers
Atomic layer deposition of SnO2 and TiO2 on electrodeposited BiOI thin films for efficient light-driven peroxymonosulfate activation
2025 · 13 citations
Wide-Bandgap Semiconductors: A Critical Analysis of GaN, SiC, AlGaN, Diamond, and Ga2O3 Synthesis Methods, Challenges, and Prospective Technological Innovations
2025 · 13 citations
Advanced Fabrication of Ultrathin Ruthenium Films Using Synergistic Atomic Layer Deposition and Etching
2025 · 9 citations
Ultrahigh purity plasma-enhanced atomic layer deposition and electrical properties of epitaxial scandium nitride
2025 · 8 citations
Photocatalytic properties of thin ZnO films synthesised with plasma-enhanced atomic layer deposition at room temperature
2025 · 5 citations
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