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Bulk micromachining
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Keyword
keyword
Bulk micromachining
RIS
0.000
(Research Intensity Score)
Papers
51
Top papers
Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication
2021 · 308 citations
Wet Anisotropic Etching Characteristics of Si{111} in KOH-Based Solution
2025 · 27 citations
High speed silicon wet anisotropic etching for applications in bulk micromachining: a review
2021 · 135 citations
Piezoelectric ZnO thin films for 2DOF MEMS vibrational energy harvesting
2018 · 130 citations
Application of femtosecond laser micromachining in silicon carbide deep etching for fabricating sensitive diaphragm of high temperature pressure sensor
2020 · 63 citations
Newest papers
Design, fabrication and testing of an optimized single-axis MEMS capacitive accelerometer using wet etching for improved noise stability
2026 · 1 citations
Femtosecond laser micromachining of Ni–Mn–Ga magnetic shape memory alloy
2026
Design and Simulation of a Mass Sensor Using Nanoscale Hf0.5Zr0.5O2 Piezoelectric Membranes with Loading Platform
2026
Three-phase ScAlN-based PMUT-driven acoustic streaming micropump
2026
Wet Anisotropic Etching Characteristics of Si{111} in KOH-Based Solution
2025 · 27 citations
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