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Bulk micromachining
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Bulk micromachining
RIS
0.000
(Research Intensity Score)
Papers
54
Top papers
Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication
2021 · 277 citations
Wet Anisotropic Etching Characteristics of Si{111} in KOH-Based Solution
2025 · 20 citations
High speed silicon wet anisotropic etching for applications in bulk micromachining: a review
2021 · 127 citations
Etching: The Art of Semiconductor Micromachining
2025 · 7 citations
Femtosecond laser micromachining of Ni–Mn–Ga magnetic shape memory alloy
2026
Design and Simulation of a Mass Sensor Using Nanoscale Hf0.5Zr0.5O2 Piezoelectric Membranes with Loading Platform
2026
Design, fabrication and testing of an optimized single-axis MEMS capacitive accelerometer using wet etching for improved noise stability
2026
Three-phase ScAlN-based PMUT-driven acoustic streaming micropump
2026
A study on chromium thin film with positive photoresist as a masking layer towards the wet bulk micromachining of Borofloat glass
2024 · 8 citations
Newest papers
Femtosecond laser micromachining of Ni–Mn–Ga magnetic shape memory alloy
2026
Design and Simulation of a Mass Sensor Using Nanoscale Hf0.5Zr0.5O2 Piezoelectric Membranes with Loading Platform
2026
Design, fabrication and testing of an optimized single-axis MEMS capacitive accelerometer using wet etching for improved noise stability
2026
Three-phase ScAlN-based PMUT-driven acoustic streaming micropump
2026
Wet Anisotropic Etching Characteristics of Si{111} in KOH-Based Solution
2025 · 20 citations
Etching: The Art of Semiconductor Micromachining
2025 · 7 citations
Chemical‐Based Bulk Machining and Fabrication of Silicon Microstructures
2025
A study on chromium thin film with positive photoresist as a masking layer towards the wet bulk micromachining of Borofloat glass
2024 · 8 citations
Non-traditional machining techniques for silicon wafers
2022 · 20 citations
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