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Capacitively coupled plasma
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Keyword
keyword
Capacitively coupled plasma
RIS
0.002
(Research Intensity Score)
Papers
133
Top papers
On the importance of excited state species in low pressure capacitively coupled plasma argon discharges
2023 · 30 citations
Metastable argon atom kinetics in a low-pressure capacitively coupled radio frequency discharge
2023 · 29 citations
Self-consistent calculation of the optical emission spectrum of an argon capacitively coupled plasma based on the coupling of particle simulation with a collisional-radiative model
2024 · 15 citations
Effective secondary electron yields for different surface materials in capacitively coupled plasmas
2025 · 11 citations
Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition
2020 · 82 citations
Selective dry etching of TiAlC over TiN using nonhalogen N2/H2 plasma
2025 · 7 citations
Control of electron velocity distributions at the wafer by tailored voltage waveforms in capacitively coupled plasmas to compensate surface charging in high-aspect ratio etch features
2021 · 39 citations
Effect of low frequency voltage waveform on plasma uniformity in a dual-frequency capacitively coupled plasma
2022 · 26 citations
Review of Plasma Processing for Polymers and Bio-Materials Using a Commercial Frequency (50/60 Hz)-Generated Discharge
2023 · 16 citations
Newest papers
High-frequency voltage effects on power deposition and ion dynamics in tailored waveform driven capacitively coupled plasmas
2026
Nonlocal electron fluxes captured using machine learning in a capacitively coupled plasma
2026
An Implicit Time-Domain Harmonic Balance Method for Radio-Frequency Capacitively Coupled Plasma Simulations
2026
A Low-Storage Implicit Dual-Time Finite-Volume Framework for Radio-Frequency Capacitively Coupled Plasma Fluid Simulations
2026
A Low-Storage Implicit Dual-Time Finite-Volume Framework for Radio-Frequency Capacitively Coupled Plasma Fluid Simulations
2026
An Implicit Time-Domain Harmonic Balance Method for Radio-Frequency Capacitively Coupled Plasma Simulations
2026
Effects of nitrogen addition to argon gas on the excited level kinetics and the optical emission from a capacitively coupled plasma
2026
Integrated collisional-radiative and nonlinear global models for capacitively coupled argon plasma discharges
2026
Decay of excited levels in argon pulsed capacitively-coupled plasma afterglows
2026
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