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Keyword keyword

Capacitively coupled plasma

RIS 0.001
Papers 133
Top papers
2023 · 34 citations
2023 · 29 citations
2020 · 82 citations
2024 · 15 citations
2025 · 11 citations
Newest papers
2026
2026
2026
2026
2026

A sample from the 100 top papers behind Capacitively coupled plasma.

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Capacitively coupled plasma's history

Research intensity over time

Capacitively coupled plasma research intensity over time Explore Capacitively coupled plasma's full history Hover any year for its value and switch resolutions with a free account. Personal adds monthly detail and the historical-intensity (HRI) line. Create a free account