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High-power impulse magnetron sputtering
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High-power impulse magnetron sputtering
RIS
0.001
(Research Intensity Score)
Papers
214
Top papers
Recent Advances in Magnetron Sputtering: From Fundamentals to Industrial Applications
2025 · 56 citations
Recent Advances in Aluminum Nitride (AlN) Growth by Magnetron Sputtering Techniques and Its Applications
2024 · 40 citations
Low temperature deposition of functional thin films on insulating substrates enabled by selective ion acceleration using synchronized floating potential HiPIMS
2025 · 19 citations
HiPIMS-enabled Ti-doped amorphous carbon coatings for high-performance PEMFC bipolar plates
2025 · 17 citations
Recent Advances in Magnetron Sputtering: From Fundamentals to Industrial Applications
2025 · 15 citations
Exploring the Potential of High-Power Impulse Magnetron Sputtering for Nitride Coatings: Advances in Properties and Applications
2025 · 18 citations
Ferroelectric AlScN thin films with enhanced polarization and low leakage enabled by high-power impulse magnetron sputtering
2025 · 13 citations
Tailoring CdS/WS2 heterostructures for enhanced photoelectrochemical water splitting via RF magnetron sputtering
2025 · 9 citations
Impact of oxygen content on phase constitution and ferroelectric behavior of hafnium oxide thin films deposited by reactive high-power impulse magnetron sputtering
2022 · 53 citations
Newest papers
An ionisation region model of reactive high-power impulse magnetron sputtering of Ti in an Ar/N 2 atmosphere
2026 · 4 citations
Tungsten-rhenium alloy as a high-density absorber in ultra-short-period multilayer for hard X-ray mirrors
2026
Influence of Substrate Manufacturing Route on HiPIMS TiAlSiN-Coated AISI 316L Stainless Steel Produced by Laser Powder Bed Fusion
2026 · 1 citations
Growth-controlled photochromism in yttrium oxyhydride thin films deposited by HiPIMS and pulsed-DC magnetron sputtering
2026 · 1 citations
The effect of stoichiometry on optical and electrochromic properties of TiOx by HiPIMS
2026 · 1 citations
An Automated Magnetron Sputtering Chamber for Ferroelectric Thin Film Deposition
2026
Tungsten-rhenium alloy as a high-density absorber in ultra-short-period multilayer for hard X-ray mirrors
2026
Recent Advances in Magnetron Sputtering: From Fundamentals to Industrial Applications
2025 · 56 citations
Low temperature deposition of functional thin films on insulating substrates enabled by selective ion acceleration using synchronized floating potential HiPIMS
2025 · 19 citations
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