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Ion beam deposition
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Ion beam deposition
RIS
0.000
(Research Intensity Score)
Papers
72
Top papers
Ion composition of beam plasma formed by electron beam evaporation of YSZ ceramic in medium vacuum
2025 · 8 citations
Impact of oxygen and hydrogen traces on the focused ion beam sputter rate and secondary ion mass spectrometry intensity detection of graphite
2026
Focused ion beam-induced platinum deposition with a low-temperature cesium ion source
2025 · 4 citations
In situ current measurement in a compact broad ion source for helium and other ions
2025 · 2 citations
A compact UHV negative halogen ion source with narrow energy spread for ion soft-landing study
2025 · 1 citations
Multielectron Ionization of Atoms by Ion Impact in the Deposition Energy Model
2025
APPROBATION OF A HIGH-EFFICIENCY COLD CATHODE ION SOURCE AS PART OF AN ION IMPLANTATION SYSTEM BALZERS MPB-202
2025
ION BEAM SYNTHESIS OF BURIED OXIDE LAYERS IN SILICON CARBIDE
2024 · 11 citations
Development of a niobium multicharged ion beamline
2025
Newest papers
Impact of oxygen and hydrogen traces on the focused ion beam sputter rate and secondary ion mass spectrometry intensity detection of graphite
2026
Ion composition of beam plasma formed by electron beam evaporation of YSZ ceramic in medium vacuum
2025 · 8 citations
Focused ion beam-induced platinum deposition with a low-temperature cesium ion source
2025 · 4 citations
In situ current measurement in a compact broad ion source for helium and other ions
2025 · 2 citations
A compact UHV negative halogen ion source with narrow energy spread for ion soft-landing study
2025 · 1 citations
Multielectron Ionization of Atoms by Ion Impact in the Deposition Energy Model
2025
APPROBATION OF A HIGH-EFFICIENCY COLD CATHODE ION SOURCE AS PART OF AN ION IMPLANTATION SYSTEM BALZERS MPB-202
2025
Development of a niobium multicharged ion beamline
2025
Surface stress modification of silicon nitride film via argon gas cluster ion beam
2025 · 2 citations
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