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Ion beam deposition
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Current data, viewed at
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resolution.
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Keyword
keyword
Ion beam deposition
RIS
0.001
(Research Intensity Score)
Papers
104
Top papers
Physical-Vapor-Deposited Metal Oxide Thin Films for pH Sensing Applications: Last Decade of Research Progress
2023 · 23 citations
Defects engineering and enhancement in optical and structural properties of 2D-MoS2 thin films by high energy ion beam irradiation
2021 · 41 citations
Ion composition of beam plasma formed by electron beam evaporation of YSZ ceramic in medium vacuum
2025 · 8 citations
Focused ion beam-induced platinum deposition with a low-temperature cesium ion source
2025 · 6 citations
Controlling the optical properties of hafnium dioxide thin films deposited with electron cyclotron resonance ion beam deposition
2023 · 17 citations
Newest papers
Impact of oxygen and hydrogen traces on the focused ion beam sputter rate and secondary ion mass spectrometry intensity detection of graphite
2026
Controllable ion beam deposition of Bi2Te3 thin films for flexible thermoelectric microdevices
2026
Ion composition of beam plasma formed by electron beam evaporation of YSZ ceramic in medium vacuum
2025 · 8 citations
Focused ion beam-induced platinum deposition with a low-temperature cesium ion source
2025 · 6 citations
In situ current measurement in a compact broad ion source for helium and other ions
2025 · 2 citations
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