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Nanolithography
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Keyword
keyword
Nanolithography
RIS
0.002
(Research Intensity Score)
Papers
214
Top papers
Nanofabrication for Nanophotonics
2025 · 116 citations
25 nm-Feature, 104-aspect-ratio, 10 mm2-area single-pulsed laser nanolithography
2025 · 48 citations
Twenty-nine million intrinsic Q -factor monolithic microresonators on thin-film lithium niobate
2024 · 65 citations
Fabrication and nanophotonic waveguide integration of silicon carbide colour centres with preserved spin-optical coherence
2021 · 193 citations
Three-dimensional nanoscale metal, metal oxide, and semiconductor frameworks through DNA-programmable assembly and templating
2024 · 45 citations
Scalable fabrication of Chip-integrated 3D-nanostructured electronic devices via DNA-programmable assembly
2025 · 22 citations
Modelling and experimental study of nanomilling 3D nanogrooves on GaSb surfaces
2026 · 12 citations
300-unit-per-second roll-to-roll manufacturing of visible metalenses
2026 · 9 citations
Direct X-ray and electron-beam lithography of halogenated zeolitic imidazolate frameworks
2020 · 199 citations
Newest papers
Modelling and experimental study of nanomilling 3D nanogrooves on GaSb surfaces
2026 · 12 citations
300-unit-per-second roll-to-roll manufacturing of visible metalenses
2026 · 9 citations
Wafer-Scale All-Dielectric Quasi-BIC Metasurfaces: Bridging High-Throughput Deep-UV Lithography with Nanophotonic Applications
2026 · 7 citations
Enhanced superconducting nanowire single-photon detector performances using silicon capping
2026 · 1 citations
Direct printing of metasurfaces using formulated optical materials
2026
Adaptive Tunneling Lithography with Field-Controlled Sub-Nanometer Resolution: Architecture, Characteristics, and Fabrication Pathway(revised version)
2026
Adaptive Tunneling Lithography with Field-Controlled Sub-Nanometer Resolution: Architecture, Characteristics, and Fabrication Pathway(revised version)
2026
Cooperative Solvent‐Thermal Interactions Enable Multi‐Material Nanotransfer Printing for Multi‐Dimensional Molecular Profiling
2026
Large-Area Flexible SERS Sensor Chips Fabricated Using a Combination of Nanosphere Self-Assembly and Glancing Angle Deposition for Chemical and Biological Sensing
2026
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