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Keyword keyword

Next-generation lithography

RIS 0.000
Papers 38
Top papers
2020 · 202 citations
2024 · 29 citations
2022 · 57 citations
2023 · 34 citations
2023 · 33 citations
Newest papers
2026 · 6 citations
2026
2026
2025 · 9 citations
2025 · 5 citations

A sample from the 38 top papers behind Next-generation lithography.

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Next-generation lithography's history

Research intensity over time

Next-generation lithography research intensity over time Explore Next-generation lithography's full history Hover any year for its value and switch resolutions with a free account. Personal adds monthly detail and the historical-intensity (HRI) line. Create a free account