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Next-generation lithography
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keyword
Next-generation lithography
RIS
0.001
(Research Intensity Score)
Papers
38
Top papers
Direct X-ray and electron-beam lithography of halogenated zeolitic imidazolate frameworks
2020 · 202 citations
Recent Advances in Metal-Oxide-Based Photoresists for EUV Lithography
2024 · 29 citations
Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithography
2023 · 34 citations
Resist-Free Lithography for Monolayer Transition Metal Dichalcogenides
2022 · 57 citations
All-Water Etching-Free Electron Beam Lithography for On-Chip Nanomaterials
2023 · 33 citations
Effects of Electron Beam Lithography Process Parameters on the Structure of Nanoscale Devices Across Three Substrate Materials
2025 · 9 citations
Demonstration of color display metasurfaces via immersion lithography on a 12-inch silicon wafer
2018 · 91 citations
Enhancing the PMMA Photoresist Film via Ozone Treatment and Vapor Phase Infiltration
2025 · 5 citations
Resists for Helium Ion Beam Lithography: Recent Advances
2020 · 26 citations
Newest papers
Development of Photolithography for Semiconductor Manufacturing – A Review
2026 · 1 citations
Micro-Structuring on Polyimide using Excimer Laser Lithography
2026
Multiphoton nonlinear lithography based on rare-earth upconversion nanoparticles
2026
Effects of Electron Beam Lithography Process Parameters on the Structure of Nanoscale Devices Across Three Substrate Materials
2025 · 9 citations
Enhancing the PMMA Photoresist Film via Ozone Treatment and Vapor Phase Infiltration
2025 · 5 citations
Antimony‐Oxo‐Cluster‐Based Polymers as Positive‐Tone EBL/EUV Photoresists: Lithography Performance Enhancement by Network Structure Modulation
2025 · 2 citations
Laser discharge in a high-pressure jet of heavy noble gas: Expansion of emitting volume promises an efficient source of EUV light for lithography
2025 · 3 citations
The fabrication of nano-scale fin LEDs using nanoimprinting lithography
2025 · 1 citations
EUV Lithography: Past, Present and Future
2025
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