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Keyword keyword

Proximity effect (electron beam lithography)

RIS 0.000
Papers 56
Top papers
2020 · 379 citations
2019 · 413 citations
2019 · 271 citations
2026 · 2 citations
2026
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Newest papers
2026 · 2 citations
2026
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Proximity effect (electron beam lithography)'s history

Research intensity over time