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Keyword keyword

Proximity effect (electron beam lithography)

RIS 0.000
Papers 56
Top papers
2020 · 390 citations
2019 · 413 citations
2019 · 283 citations
2018 · 230 citations
2016 · 188 citations
Newest papers
2026 · 2 citations
2026
2026
2026
2026

A sample from the 56 top papers behind Proximity effect (electron beam lithography).

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Proximity effect (electron beam lithography)'s history

Research intensity over time

Proximity effect (electron beam lithography) research intensity over time Explore Proximity effect (electron beam lithography)'s full history Hover any year for its value and switch resolutions with a free account. Personal adds monthly detail and the historical-intensity (HRI) line. Create a free account