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ruthenium interconnect
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keyword
ruthenium interconnect
RIS
0.000
(Research Intensity Score)
Papers
4
Top papers
Synergistic mechanism between 1,2,4-triazole and nicotinic acid as eco-friendly inhibitors of micro-galvanic corrosion for copper/ruthenium interconnect in chemical mechanical polishing
2026
Ruthenium interconnect resistivity and reliability at 48 nm pitch
2016 · 52 citations
Atomic layer deposited ultrathin metal nitride barrier layers for ruthenium interconnect applications
2017 · 22 citations
Electromigration Reliability of Buried Power Rails in Vertically Stacked Devices
2023 · 1 citations
Newest papers
Synergistic mechanism between 1,2,4-triazole and nicotinic acid as eco-friendly inhibitors of micro-galvanic corrosion for copper/ruthenium interconnect in chemical mechanical polishing
2026
Electromigration Reliability of Buried Power Rails in Vertically Stacked Devices
2023 · 1 citations
Atomic layer deposited ultrathin metal nitride barrier layers for ruthenium interconnect applications
2017 · 22 citations
Ruthenium interconnect resistivity and reliability at 48 nm pitch
2016 · 52 citations
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