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Current data, viewed at Yearly resolution. Personal members see monthly resolution →
Keyword keyword

Silicon oxynitride

RIS 0.001
Papers 150
Top papers
2024 · 67 citations
2025 · 56 citations
2022 · 98 citations
2024 · 25 citations
2023 · 19 citations
Newest papers
2026
2026 · 1 citations
2026 · 1 citations
2025 · 56 citations
2025 · 8 citations

A sample from the 100 top papers behind Silicon oxynitride.

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Silicon oxynitride's history

Research intensity over time

Silicon oxynitride research intensity over time Explore Silicon oxynitride's full history Hover any year for its value and switch resolutions with a free account. Personal adds monthly detail and the historical-intensity (HRI) line. Create a free account