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Trimethylgallium
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Keyword
keyword
Trimethylgallium
RIS
0.001
(Research Intensity Score)
Papers
85
Top papers
MOCVD growth of high purity Ga2O3 epitaxial films using trimethylgallium precursor
2020 · 142 citations
Ge doping of β-Ga2O3 by MOCVD
2021 · 78 citations
Epitaxial growth of high-quality GaN with a high growth rate at low temperatures by radical-enhanced metalorganic chemical vapor deposition
2024 · 18 citations
Reduction of carbon impurities in GaN grown by MOCVD using an NH3-plasma source
2026 · 2 citations
Kilovolt-class β-Ga2O3 field-plated Schottky barrier diodes with MOCVD-grown intentionally 1015 cm−3 doped drift layers
2025 · 3 citations
Metalorganic chemical vapor deposition epitaxy of β-Ga2O3 films on (001) Ga2O3 substrates with fast growth rates
2025 · 4 citations
DFT Study of Initial Surface Reactions in Gallium Nitride Atomic Layer Deposition Using Trimethylgallium and Ammonia
2025 · 3 citations
In‐Cycle Helium Plasma Integrated Atomic Layer Deposition Process for Screening Effect Alleviation and Performance Enhancement in a‐IGZO TFTs
2025 · 1 citations
Gallium incorporation in blue-emitting In 1− x Ga x P alloy quantum dots facilitated by monomeric gallium precursors
2025 · 2 citations
Newest papers
Reduction of carbon impurities in GaN grown by MOCVD using an NH3-plasma source
2026 · 2 citations
Kilovolt-class β-Ga2O3 field-plated Schottky barrier diodes with MOCVD-grown intentionally 1015 cm−3 doped drift layers
2025 · 3 citations
Metalorganic chemical vapor deposition epitaxy of β-Ga2O3 films on (001) Ga2O3 substrates with fast growth rates
2025 · 4 citations
DFT Study of Initial Surface Reactions in Gallium Nitride Atomic Layer Deposition Using Trimethylgallium and Ammonia
2025 · 3 citations
In‐Cycle Helium Plasma Integrated Atomic Layer Deposition Process for Screening Effect Alleviation and Performance Enhancement in a‐IGZO TFTs
2025 · 1 citations
Gallium incorporation in blue-emitting In 1− x Ga x P alloy quantum dots facilitated by monomeric gallium precursors
2025 · 2 citations
Chemical reaction mechanism between trimethylgallium and oxygen for β-gallium oxide growth: Thermodynamic and experimental studies
2025 · 1 citations
Applications of Organometallics in Organic Electronics
2025
Thermal Atomic Layer Etching of Zinc Oxide from 30–300 °C Using Sequential Exposures of Hydrogen Fluoride and Trimethylgallium
2025 · 2 citations
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