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Trimethylgallium
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Current data, viewed at
Yearly
resolution.
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Keyword
keyword
Trimethylgallium
RIS
0.001
(Research Intensity Score)
Papers
81
Top papers
MOCVD growth of high purity Ga2O3 epitaxial films using trimethylgallium precursor
2020 · 143 citations
Ge doping of β-Ga2O3 by MOCVD
2021 · 81 citations
Epitaxial growth of high-quality GaN with a high growth rate at low temperatures by radical-enhanced metalorganic chemical vapor deposition
2024 · 19 citations
Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition
2020 · 82 citations
Compact Ga2O3 Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition at Low Temperature
2022 · 30 citations
Newest papers
Reduction of carbon impurities in GaN grown by MOCVD using an NH3-plasma source
2026 · 2 citations
Kilovolt-class β-Ga2O3 field-plated Schottky barrier diodes with MOCVD-grown intentionally 1015 cm−3 doped drift layers
2025 · 3 citations
Metalorganic chemical vapor deposition epitaxy of β-Ga2O3 films on (001) Ga2O3 substrates with fast growth rates
2025 · 4 citations
DFT Study of Initial Surface Reactions in Gallium Nitride Atomic Layer Deposition Using Trimethylgallium and Ammonia
2025 · 3 citations
Gallium incorporation in blue-emitting In 1− x Ga x P alloy quantum dots facilitated by monomeric gallium precursors
2025 · 2 citations
A sample from the 81 top papers behind Trimethylgallium.
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