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Keyword keyword

X-ray lithography

RIS 0.001
Papers 52
Top papers
2024 · 76 citations
2024 · 55 citations
2020 · 202 citations
2024 · 29 citations
2020 · 153 citations
Newest papers
2026 · 1 citations
2026
2026
2026
2025 · 9 citations

A sample from the 52 top papers behind X-ray lithography.

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X-ray lithography's history

Research intensity over time

X-ray lithography research intensity over time Explore X-ray lithography's full history Hover any year for its value and switch resolutions with a free account. Personal adds monthly detail and the historical-intensity (HRI) line. Create a free account