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X-ray lithography
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X-ray lithography
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Papers
64
Top papers
Grayscale Lithography and a Brief Introduction to Other Widely Used Lithographic Methods: A State-of-the-Art Review
2024 · 73 citations
Liquid Hydrogen Temperature Cryostage for Ice-Assisted Electron-Beam Lithography
2024 · 55 citations
Direct X-ray and electron-beam lithography of halogenated zeolitic imidazolate frameworks
2020 · 199 citations
Recent Advances in Metal-Oxide-Based Photoresists for EUV Lithography
2024 · 26 citations
Microlithography
2020 · 153 citations
Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithography
2023 · 32 citations
Effects of Electron Beam Lithography Process Parameters on the Structure of Nanoscale Devices Across Three Substrate Materials
2025 · 9 citations
Optimization of Grayscale Lithography for the Fabrication of Flat Diffractive Infrared Lenses on Silicon Wafers
2024 · 11 citations
Hybrid metal-organic clusters resist for next-generation high-NA EUV lithography
2026 · 1 citations
Newest papers
Hybrid metal-organic clusters resist for next-generation high-NA EUV lithography
2026 · 1 citations
An exit transmission window for mirrorless EUV and soft-x-ray lithography: hermetically separating a dense superfluorescent gain medium from the vacuum while transmitting the amplified beam
2026
Micro-Structuring on Polyimide using Excimer Laser Lithography
2026
Multiphoton nonlinear lithography based on rare-earth upconversion nanoparticles
2026
Effects of Electron Beam Lithography Process Parameters on the Structure of Nanoscale Devices Across Three Substrate Materials
2025 · 9 citations
Antimony‐Oxo‐Cluster‐Based Polymers as Positive‐Tone EBL/EUV Photoresists: Lithography Performance Enhancement by Network Structure Modulation
2025 · 2 citations
Direct laser writing lithography of photo-insensitive durable GST thin films with near 100% yield
2025 · 5 citations
Measurement of the lithographic point-spread function of a focused helium ion beam in negative-tone PMMA and fullerene resists on ultrathin membranes
2025 · 1 citations
Spectral Tuning and Angular–Gap Interrogation of Terahertz Spoof Surface Plasmon Resonances Excited on Rectangular Subwavelength Grating Using Attenuated Total Reflection in Otto Configuration
2025 · 1 citations
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