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Keyword keyword

silicon nitride

RIS 0.064
Papers 11783
Top papers
2025 · 195 citations
2024 · 269 citations
2023 · 242 citations
2023 · 294 citations
2022 · 392 citations
Newest papers
2025 · 195 citations
2025 · 70 citations
2025 · 43 citations
2025 · 51 citations
2025 · 40 citations

A sample from the 100 top papers behind silicon nitride.

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Where this work sits

Research communities

Share of silicon nitride's papers that fall in each densely co-citing group.

silicon nitride's history

Research intensity over time