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Sputter deposition
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Keyword
keyword
Sputter deposition
RIS
0.019
(Research Intensity Score)
Papers
3399
Top papers
Recent Advances in Magnetron Sputtering: From Fundamentals to Industrial Applications
2025 · 56 citations
Evolutionary manufacturing approaches for advancing flexible perovskite solar cells
2024 · 98 citations
A Review of Transparent Conducting Films (TCFs): Prospective ITO and AZO Deposition Methods and Applications
2024 · 60 citations
Study on the oxidation behavior of a novel thermal barrier coating system using the nanocrystalline coating as bonding coating on the single-crystal superalloy
2023 · 105 citations
Electrostatic Shielding Regulation of Magnetron Sputtered Al-Based Alloy Protective Coatings Enables Highly Reversible Zinc Anodes
2022 · 250 citations
Vertically aligned MoSe2-WS2 nanoworms heterojunction towards room temperature NO2 gas sensors
2024 · 69 citations
Advances in Flexible Thermoelectric Materials and Devices Fabricated by Magnetron Sputtering
2023 · 92 citations
Chemiresistive n-butanol gas sensors based on Co3O4@ZnO hollow-sphere-array thin films prepared by template-assisted magnetron sputtering
2024 · 59 citations
A Review of CIGS Thin Film Semiconductor Deposition via Sputtering and Thermal Evaporation for Solar Cell Applications
2024 · 48 citations
Newest papers
Ultrathin bismuth-yttrium iron garnet films with tunable magnetic anisotropy
2026 · 4 citations
Recent Advances in Magnetron Sputtering: From Fundamentals to Industrial Applications
2025 · 56 citations
Band Gap Energy and Lattice Distortion in Anatase TiO2 Thin Films Prepared by Reactive Sputtering with Different Thicknesses
2025 · 30 citations
Structural, optical property and solar-blind photoelectric detection performance of high-quality Mg-doped β-Ga2O3 thin films prepared using RF magnetron sputtering
2025 · 27 citations
ToF-SIMS sputter depth profiling of interphases and coatings on lithium metal surfaces
2025 · 26 citations
Influence of O2 flow rate on the electrochemical hydrogen evolution reaction performance of Cu/Cu2O/Grade stainless steel prepared by RF magnetron sputtering
2025 · 22 citations
Low temperature deposition of functional thin films on insulating substrates enabled by selective ion acceleration using synchronized floating potential HiPIMS
2025 · 19 citations
Recent Advances in Magnetron Sputtering: From Fundamentals to Industrial Applications
2025 · 15 citations
Facile one-step radio frequency magnetron sputtering of Ni/NiO on stainless steel for an efficient electrode for hydrogen evolution reaction
2025 · 17 citations
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