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Keyword keyword

Sputter deposition

RIS 0.031
Papers 3670
Top papers
2025 · 62 citations
2024 · 76 citations
2024 · 98 citations
2023 · 107 citations
2022 · 253 citations
Newest papers
2025 · 62 citations
2025 · 30 citations
2025 · 27 citations
2025 · 29 citations
2025 · 22 citations

A sample from the 100 top papers behind Sputter deposition.

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Where this work sits

Research communities

Share of Sputter deposition's papers that fall in each densely co-citing group.

Sputter deposition's history

Research intensity over time